Single Axis Silicon Accelerometer Die

The MTX1-50G series capacitive silicon accelerometer sensors are manufactured in class 10 clean room using state of the art CMOS and bulk micro-machining capabilities. They are manufactured in six inched wafers, utilizing DRIE techniques and patented processes.

FEATURES
• Excellent accuracy over 50g range
• Good temperature performance
• Low cost design
• Capacitive, high performance
• 100% factory tested
• High volume manufacturing
• Patented process

THE MAIN FIELD OF APPLICATIONS
✓ Acceleration Measurement
✓ Vibration measurement
✓ Inclination Measurement