DESCRIPTION
The MS7310D pressure sensor die is designed for low pressure sensor systems with the highest demands on resolution and accuracy. Its sensor element consists of a silicon micro-machined membrane bonded on a Pyrex™ glass support. The sensor signal is proportional to the pressure difference between back and front side of the membrane. The pressure is sensed by four implanted piezoresistors, giving a large output signal.

• 0 to 10 kPa (100 mbar or 1.45 PSI)
• Uncompensated differential pressure sensor die
• Piezoresistive silicon micromachined sensor
• High output signal 110 mV
• Small size
• RoHS-compatible & Pb-free1

FEATURES
• Uncompensated differential pressure sensor die 
• Die size 2.45 mm x 2.45 mm
• Output span 110 mV @ 5 V 
• Low cost, high reliability, low drift
• Temperature range -40°C to +125 °C 
• High pressure burst capability (600 kPa)
• Typical linearity 0.35% (10kPa) or 0.1% (2kPa)

APPLICATION
• Washing machines 
• Industrial controls
• Level indicators 
• Leak detection