HEATED (45°C OR 100°C) GENERAL PURPOSE ABSOLUTE BARATRON® CAPACITANCE MANOMETERS

   Many thin film and industrial applications require accurate, reliable measurement of vacuum in processes where condensation of byproducts could affect the performance of the sensor. To meet these challenging requirements and offer a cost-effective solution, MKS developed the 727A and 728A Baratron® heated general purpose absolute capacitance manometers. Its blend of small size, high operating temperatures, rugged corrosion-resistant Inconel® sensor, and performance make it an ideal solution for new process equipment and retrofits into existing process tools.

FEATUREs & Benefits
• Smallest heated Baratron manometer
   available, easily mounts inside process
   systems and even gas cabinets
• Operating temperatures of 45°C or
   100°C prevent deposition of process
   gases and byproducts that cause drift
• Full Scale pressure ranges from 1000
   to 1 Torr
• Typical accuracy of 0.50% of Reading
   gives most accurate measurements at
   low end of pressure range
• Measurement is independent of gas
   composition
• Analog output of 0-10VDC permits
   interfacing with most control
   systems

APPLICATIONs
• Semiconductor Precursor Gas Delivery
• Flat Panel Display Manufacturing
   Equipment
• Optical and Magnetic Data Storage
   Manufacturing Equipment
• Biopharmaceutical Processing Systems
• Advanced Materials Thermal Processing
   Systems