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SM5112

Harsh Environment Absolute Silicon Pressure Die

Unspecified 

SILICON

MICROSTRUCTURES

INCORPORATED

SM5112

Harsh Environment Absolute

Silicon Pressure Die

• OEM ABSOLUTE SILICON PRESSURE SENSOR DIE FOR HARSH

ENVIRONMENTS

• REAR ENTRY FOR PROTECTION OF THE PIEZORESISTIVE BRIDGE

NETWORK – ONLY SILICON AND GLASS EXPOSED

DESCRIPTION

The SM5112 is a silicon micro-machined,

piezoresistive pressure-sensing chip. The

SM5112 is designed for harsh environments

where absolute pressure needs to be

accurately measured. These devices are

available in full-scale ranges from 15 to 300

psi and are ideal for OEM and high volume

applications.

Provided in die form, these sensors can be

mounted on ceramic or PC board substrates

as part of an OEM system. They also may

be packaged into proprietary, or application

specific sensor lines.

Die are probed, inked and diced, and

shipped on tape.

Custom pressure ranges available in high-

volume applications.

FEATURES

• High Volume, Low Cost

• Absolute Version

• Constant Current or Constant Voltage

Drive

• Millivolt Output

• 15, 30, 60, 150 and 300 PSI Ranges

Available

APPLICATIONS

• Altimeters

• Tire Gauges

• Medical Instrumentation

• Industrial Sensors

• Diving Modules

• Home Appliances

Rev 1.1 10_04

 2003

Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA

Tel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ sales@ si-micro.com ♦ www.si-micro.com

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