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MPVZ12G
(Rev.:2006)

10 kPa Uncompensated Silicon Pressure Sensors

Freescale Semiconductor 

Table 2. Operating Characteristics (VS = 3.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2)

Characteristic

Symbol

Min

Typ

Max

Unit

Differential Pressure Range(1)

Supply Voltage(2)

POP

0

—

10

kPa

VS

—

3.0

6.0

Vdc

Supply Current

Full Scale Span(3)

Offset(4)

Io

—

6.0

—

mAdc

VFSS

45

55

70

mV

Voff

0

20

35

mV

Sensitivity

∆V/∆P

—

5.5

—

mV/kPa

Linearity(5)

Pressure Hysteresis6 (0 to 10 kPa)

Temperature Hysteresis(5) (–40°C to +125°C)

Temperature Coefficient of Full Scale Span(5)

Temperature Coefficient of Offset(5)

Temperature Coefficient of Resistance(5)

—

—

—

TCVFSS

TCVoff

TCR

–0.5

—

—

– 0.22

—

0.28

—

±0.1

±0.5

—

±15

—

0.5

—

—

– 0.16

—

0.34

%VFSS

%VFSS

%VFSS

%VFSS/°C

µV/°C

%Zin/°C

Input Impedance

Zin

400

—

550

W

Output Impedance

Response Time(6) (10% to 90%)

Warm-Up Time(7)

Zout

750

—

1250

W

tR

—

1.0

—

ms

—

—

20

—

ms

Offset Stability(8)

—

—

±0.5

—

%VFSS

1. 1.0 kPa (kiloPascal) equals 0.145 psi.

2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional

error due to device self-heating.

3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

minimum related pressure.

4. Offset (VOFF) is defined as the output voltage at the minimum rated pressure.

5. Accuracy (error budget) consists of the following:

• Linearity:

Output deviation from a straight line relationship with pressure, using end point method, over the specified

pressure range.

• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to

and from the minimum or maximum operating temperature points, with zero differential pressure applied.

• Pressure Hysteresis:

Output deviation at any pressure with the specified range, when this pressure is cycled to and from the minimum

or maximum rated pressure at 25°C.

• TcSpan:

Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.

• TcOffset:

Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C.

• TCR:

ZIN deviation with minimum rated pressure applied, over the temperature range of -40°C to ±125°C, relative to

25°C.

6. Response Time is defined as the time form the incremental change in the output to go from 10% to 90% of its final value when subjected to

a specified step change in pressure.

7. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the pressure is stabilized.

8. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

Sensors

Freescale Semiconductor

MPVZ12

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